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Chemical Datasheet


2.3 - Poisonous gas 8 - Corrosive
Chemical Identifiers | Hazards | Response Recommendations | Physical Properties | Regulatory Information | Alternate Chemical Names

Chemical Identifiers

The Chemical Identifier fields include common identification numbers, the NFPA diamond, U.S. Department of Transportation hazard labels, and a general description of the chemical. The information in CAMEO Chemicals comes from a variety of data sources..
CAS Number UN/NA Number DOT Hazard Label USCG CHRIS Code
  • Poison Gas
  • Corrosive
NFPA 704
Diamond Hazard Value Description
3 2
Blue Health 3 Can cause serious or permanent injury.
Red Flammability 0 Will not burn under typical fire conditions.
Yellow Instability 2 Readily undergoes violent chemical changes at elevated temperatures and pressures.
White Special W Reacts violently or explosively with water.
(NFPA, 2010)
NIOSH Pocket Guide International Chem Safety Card
General Description
A colorless, nonflammable, corrosive and toxic gas with a pungent odor similar to that of hydrochloric acid. Very toxic by inhalation. Vapor is heavier than air. Under prolonged exposure to heat the containers may rupture violently and rocket.


The Hazard fields include special hazard alerts, air and water reactions, fire hazards, health hazards, a reactivity profile, and details about reactive groups assignments and potentially incompatible absorbents. The information in CAMEO Chemicals comes from a variety of data sources.
Reactivity Alerts
Air & Water Reactions
Fumes in air. Decomposed exothermically by water or moisture in the air to hydrofluoric acid and silicic acid [Merck 11th ed. 1989; Handling Chemicals Safely 1980 p. 821].
Fire Hazard
Excerpt from ERG Guide 125 [Gases - Corrosive]:

Some may burn but none ignite readily. Vapors from liquefied gas are initially heavier than air and spread along ground. Some of these materials may react violently with water. Cylinders exposed to fire may vent and release toxic and/or corrosive gas through pressure relief devices. Containers may explode when heated. Ruptured cylinders may rocket. For UN1005: Anhydrous ammonia, at high concentrations in confined spaces, presents a flammability risk if a source of ignition is introduced. (ERG, 2016)
Health Hazard
Excerpt from ERG Guide 125 [Gases - Corrosive]:

TOXIC; may be fatal if inhaled, ingested or absorbed through skin. Vapors are extremely irritating and corrosive. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire will produce irritating, corrosive and/or toxic gases. Runoff from fire control may cause pollution. (ERG, 2016)
Reactivity Profile
When heated to decomposition SILICON TETRAFLUORIDE emits toxic fluoride fumes [Lewis, 3rd ed., 1993, p. 1138]. Reacts violently with alcohols to form HF. Attacks many metals in the presence of moisture. Reacts violently to explosively with lithium nitride [Porritt, L. J., Chem. Brit., 1979, 15, p. 282]. Mixtures with sodium are shock-sensitive explosives [Leleu, Cahiers, 1975, (79), p. 270].
Belongs to the Following Reactive Group(s)
Potentially Incompatible Absorbents

Use caution: Liquids with this reactive group classification have been known to react with the absorbents listed below. More info about absorbents, including situations to watch out for...

Response Recommendations

The Response Recommendation fields include isolation and evacuation distances, as well as recommendations for firefighting, non-fire response, protective clothing, and first aid. The information in CAMEO Chemicals comes from a variety of data sources.
Isolation and Evacuation
Excerpt from ERG Guide 125 [Gases - Corrosive]:

As an immediate precautionary measure, isolate spill or leak area for at least 100 meters (330 feet) in all directions.

SPILL: See ERG Table 1 - Initial Isolation and Protective Action Distances on the UN/NA 1859 datasheet.

FIRE: If tank, rail car or tank truck is involved in a fire, ISOLATE for 1600 meters (1 mile) in all directions; also, consider initial evacuation for 1600 meters (1 mile) in all directions. (ERG, 2016)
Excerpt from ERG Guide 125 [Gases - Corrosive]:

SMALL FIRE: Dry chemical or CO2.

LARGE FIRE: Water spray, fog or regular foam. Move containers from fire area if you can do it without risk. Do not get water inside containers. Damaged cylinders should be handled only by specialists.

FIRE INVOLVING TANKS: Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Cool containers with flooding quantities of water until well after fire is out. Do not direct water at source of leak or safety devices; icing may occur. Withdraw immediately in case of rising sound from venting safety devices or discoloration of tank. ALWAYS stay away from tanks engulfed in fire. (ERG, 2016)
Non-Fire Response
Excerpt from ERG Guide 125 [Gases - Corrosive]:

Fully encapsulating, vapor-protective clothing should be worn for spills and leaks with no fire. Do not touch or walk through spilled material. Stop leak if you can do it without risk. If possible, turn leaking containers so that gas escapes rather than liquid. Prevent entry into waterways, sewers, basements or confined areas. Do not direct water at spill or source of leak. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Isolate area until gas has dispersed. (ERG, 2016)
Protective Clothing
Excerpt from ERG Guide 125 [Gases - Corrosive]:

Wear positive pressure self-contained breathing apparatus (SCBA). Wear chemical protective clothing that is specifically recommended by the manufacturer. It may provide little or no thermal protection. Structural firefighters' protective clothing provides limited protection in fire situations ONLY; it is not effective in spill situations where direct contact with the substance is possible. (ERG, 2016)
DuPont Tychem® Suit Fabrics
No information available.
First Aid
Excerpt from ERG Guide 125 [Gases - Corrosive]:

Ensure that medical personnel are aware of the material(s) involved and take precautions to protect themselves. Move victim to fresh air. Call 911 or emergency medical service. Give artificial respiration if victim is not breathing. Do not use mouth-to-mouth method if victim ingested or inhaled the substance; give artificial respiration with the aid of a pocket mask equipped with a one-way valve or other proper respiratory medical device. Administer oxygen if breathing is difficult. Remove and isolate contaminated clothing and shoes. In case of contact with liquefied gas, thaw frosted parts with lukewarm water. In case of contact with substance, immediately flush skin or eyes with running water for at least 20 minutes. In case of contact with Hydrogen fluoride, anhydrous (UN1052), flush with large amounts of water. For skin contact, if calcium gluconate gel is available, rinse 5 minutes, then apply gel. Otherwise, continue rinsing until medical treatment is available. For eyes, flush with water or a saline solution for 15 minutes. Keep victim calm and warm. Keep victim under observation. Effects of contact or inhalation may be delayed. (ERG, 2016)

Physical Properties

The Physical Property fields include properties such as vapor pressure and boiling point, as well as explosive limits and toxic exposure thresholds. The information in CAMEO Chemicals comes from a variety of data sources.
Chemical Formula:
  • SiF4
Flash Point: data unavailable
Lower Explosive Limit (LEL): data unavailable
Upper Explosive Limit (UEL): data unavailable
Autoignition Temperature: data unavailable
Melting Point: data unavailable
Vapor Pressure: data unavailable
Vapor Density (Relative to Air): data unavailable
Specific Gravity: data unavailable
Boiling Point: data unavailable
Molecular Weight: 104.079
Water Solubility: data unavailable
Ionization Potential: data unavailable
IDLH: data unavailable

AEGLs (Acute Exposure Guideline Levels)

Interim AEGLs for Silicon tetrafluoride (7783-61-1)
Exposure Period AEGL-1 AEGL-2 AEGL-3
10 minutes 0.05 ppm 6.3 ppm 19 ppm
30 minutes 0.05 ppm 4.3 ppm 13 ppm
60 minutes 0.05 ppm 3.3 ppm 10 ppm
4 hours 0.05 ppm 0.87 ppm 2.6 ppm
8 hours 0.05 ppm 0.43 ppm 1.3 ppm
(NAC/NRC, 2016)

ERPGs (Emergency Response Planning Guidelines)

No ERPG information available.

PACs (Protective Action Criteria)

Chemical PAC-1 PAC-2 PAC-3
Silicon tetrafluoride; (Tetrafluorosilane) (7783-61-1) 0.05 ppm 3.3 ppm 10 ppm
(DOE, 2016)

Regulatory Information

The Regulatory Information fields include information from the U.S. Environmental Protection Agency's Title III Consolidated List of Lists and the U.S. Department of Homeland Security's Chemical Facility Anti-Terrorism Standards (see more about these data sources).

EPA Consolidated List of Lists

No regulatory information available.

DHS Chemical Facility Anti-Terrorism Standards (CFATS)

Chemical of Interest CAS Number Min Conc STQ Security
Min Conc STQ Security
Min Conc STQ Security
Silicon tetrafluoride 7783-61-1 15.00 % 45 pounds WME

(DHS, 2007)

Alternate Chemical Names

This section provides a listing of alternate names for this chemical, including trade names and synonyms.