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Chemical Datasheet

TRICHLOROSILANE

4.3 - Dangerous when wet 3 - Flammable liquid 8 - Corrosive
Chemical Identifiers | Hazards | Response Recommendations | Physical Properties | Regulatory Information | Alternate Chemical Names

Chemical Identifiers

The Chemical Identifier fields include common identification numbers, the NFPA diamond U.S. Department of Transportation hazard labels, and a general description of the chemical. The information in CAMEO Chemicals comes from a variety of data sources.
CAS Number UN/NA Number DOT Hazard Label USCG CHRIS Code
  • 10025-78-2   (TRICHLOROSILANE)
  • Dangerous When Wet
  • Flammable Liquid
  • Corrosive
NIOSH Pocket Guide International Chem Safety Card
none
NFPA 704
Diamond Hazard Value Description
4
3 2
W
Blue Health 3 Can cause serious or permanent injury.
Red Flammability 4 Burns readily. Rapidly or completely vaporizes at atmospheric pressure and normal ambient temperature.
Yellow Instability 2 Readily undergoes violent chemical changes at elevated temperatures and pressures.
White Special W Reacts violently or explosively with water.
(NFPA, 2010)
General Description
A colorless fuming liquid with a pungent odor. Flash point 7°F. Vapor and liquid cause burns. More dense than water. Vapors are heavier than air.

Hazards

The Hazard fields include special hazard alerts air and water reactions, fire hazards, health hazards, a reactivity profile, and details about reactive groups assignments and potentially incompatible absorbents. The information in CAMEO Chemicals comes from a variety of data sources.
Reactivity Alerts
Air & Water Reactions
Highly flammable. Ignites spontaneously in air [NFPA, 1991]. Reacts violently with water, steam, moisture in air to generate heat and flammable (H2) and corrosive (HCl) gases. [Handling Chemicals Safely 1980. p. 924].

Based on a scenario where the chemical is spilled into an excess of water (at least 5 fold excess of water), half of the maximum theoretical yield of Hydrogen Chloride gas will be created in 0.03 minutes. Experimental details are in the following: "Development of the Table of Initial Isolation and Protective Distances for the 2008 Emergency Response Guidebook", ANL/DIS-09-2, D.F. Brown, H.M. Hartmann, W.A. Freeman, and W.D. Haney, Argonne National Laboratory, Argonne, Illinois, June 2009.
Fire Hazard
Special Hazards of Combustion Products: Toxic hydrogen chloride and phosgene gases may form in fires.

Behavior in Fire: Difficult to extinguish; re-ignition may occur. Vapor is heavier than air and may travel a considerable distance to a source of ignition and flash back. (USCG, 1999)
Health Hazard
Inhalation causes severe irritation of respiratory system. Liquid causes severe burns of eyes and skin. Ingestion causes severe burns of mouth and stomach. (USCG, 1999)
Reactivity Profile
TRICHLOROSILANE reacts with alcohols, acetone, light metals with generation of heat and combustible (H2) and corrosive (HCl) gases [Handling Chemicals Safely 1980. p. 924].
Belongs to the Following Reactive Group(s)
Potentially Incompatible Absorbents

Use caution: Liquids with this reactive group classification have been known to react with the absorbents listed below. More info about absorbents, including situations to watch out for...

Response Recommendations

The Response Recommendation fields include isolation and evacuation distances, as well as recommendations for firefighting, non-fire response, protective clothing, and first aid. The information in CAMEO Chemicals comes from a variety of data sources.
Isolation and Evacuation
Excerpt from ERG Guide 139 [Substances - Water-Reactive (Emitting Flammable and Toxic Gases)]:

IMMEDIATE PRECAUTIONARY MEASURE: Isolate spill or leak area in all directions for at least 50 meters (150 feet) for liquids and at least 25 meters (75 feet) for solids.

SPILL: See ERG Table 1 - Initial Isolation and Protective Action Distances on the UN/NA 1295 datasheet.

FIRE: If tank, rail car or tank truck is involved in a fire, ISOLATE for 800 meters (1/2 mile) in all directions; also, consider initial evacuation for 800 meters (1/2 mile) in all directions. (ERG, 2020)
Firefighting
Excerpt from ERG Guide 139 [Substances - Water-Reactive (Emitting Flammable and Toxic Gases)]:

DO NOT USE WATER OR FOAM. (FOAM MAY BE USED FOR CHLOROSILANES, SEE BELOW).

SMALL FIRE: Dry chemical, soda ash, lime or sand.

LARGE FIRE: DRY sand, dry chemical, soda ash or lime or withdraw from area and let fire burn. FOR CHLOROSILANES, DO NOT USE WATER; use AFFF alcohol-resistant medium-expansion foam; DO NOT USE dry chemicals, soda ash or lime on chlorosilane fires (large or small) as they may release large quantities of hydrogen gas that may explode. If it can be done safely, move undamaged containers away from the area around the fire.

FIRE INVOLVING TANKS OR CAR/TRAILER LOADS: Fight fire from maximum distance or use unmanned master stream devices or monitor nozzles. Cool containers with flooding quantities of water until well after fire is out. Do not get water inside containers. Withdraw immediately in case of rising sound from venting safety devices or discoloration of tank. ALWAYS stay away from tanks engulfed in fire. (ERG, 2020)
Non-Fire Response
Excerpt from ERG Guide 139 [Substances - Water-Reactive (Emitting Flammable and Toxic Gases)]:

ELIMINATE all ignition sources (no smoking, flares, sparks or flames) from immediate area. Do not touch or walk through spilled material. Stop leak if you can do it without risk. DO NOT GET WATER on spilled substance or inside containers. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. FOR CHLOROSILANES, use AFFF alcohol-resistant medium-expansion foam to reduce vapors.

SMALL SPILL: Cover with DRY earth, DRY sand or other non-combustible material followed with plastic sheet to minimize spreading or contact with rain. Dike for later disposal; do not apply water unless directed to do so.

POWDER SPILL: Cover powder spill with plastic sheet or tarp to minimize spreading and keep powder dry. DO NOT CLEAN-UP OR DISPOSE OF, EXCEPT UNDER SUPERVISION OF A SPECIALIST. (ERG, 2020)
Protective Clothing
Acid-vapor-type respiratory protection; rubber gloves; chemical worker's goggles; other protective equipment as necessary to protect skin and eyes. (USCG, 1999)
DuPont Tychem® Suit Fabrics
Tychem® Fabric Legend
QS = Tychem 2000 SFR
QC = Tychem 2000
SL = Tychem 4000
C3 = Tychem 5000
TF = Tychem 6000
TP = Tychem 6000 FR
RC = Tychem RESPONDER® CSM
TK = Tychem 10000
RF = Tychem 10000 FR
Testing Details
The fabric permeation data was generated for DuPont by a third party laboratory. Permeation data for industrial chemicals is obtained per ASTM F739. Normalized breakthrough times (the time at which the permeation rate exceeds 0.1 μg/cm2/min) are reported in minutes. All chemicals have been tested between approximately 20°C and 27°C unless otherwise stated. All chemicals have been tested at a concentration of greater than 95% unless otherwise stated.
Chemical warfare agents (Lewisite, Sarin, Soman, Sulfur Mustard, Tabun and VX Nerve Agent) have been tested at 22°C and 50% relative humidity per military standard MIL-STD-282. "Breakthrough time" for chemical warfare agents is defined as the time when the cumulative mass which permeated through the fabric exceeds the limit in MIL-STD-282 [either 1.25 or 4.0 μg/cm2].
A Caution from DuPont
This information is based upon technical data that DuPont believes to be reliable on the date issued. It is subject to revision as additional knowledge and experience are gained. The information reflects laboratory performance of fabrics, not complete garments, under controlled conditions. It is intended for informational use by persons having technical skill for evaluation under their specific end-use conditions, at their own discretion and risk. It is the user's responsibility to determine the level of toxicity and the proper personal protective equipment needed. Anyone intending to use this information should first verify that the garment selected is suitable for the intended use. In many cases, seams and closures have shorter breakthrough times and higher permeation rates than the fabric. If fabric becomes torn,abraded or punctured, or if seams or closures fail, or if attached gloves, visors, etc. are damaged, end user should discontinue use of garment to avoid potential exposure to chemical. Since conditions of use are outside our control, DuPont makes no warranties, express or implied, including, without limitation, no warranties of merchantability or fitness for a particular use and assume no liability in connection with any use of this information. This information is not intended as a license to operate under or a recommendation to infringe any patent, trademark or technical information of DuPont or others covering any material or its use.
Normalized Breakthrough Times (in Minutes)
Chemical CAS Number State QS QC SL C3 TF TP RC TK RF
Trichloro silane 10025-78-2 Liquid 60 >480 >480 >480 >480
> indicates greater than.

Special Warning from DuPont: Tychem® and Tyvek® fabrics should not be used around heat, flames, sparks or in potentially flammable or explosive environments. Only...

...Tychem® ThermoPro, Tychem® Reflector® and Tychem® TK styles 600T/601T (with aluminized outer suit) garments are designed and tested to help reduce burn injury during escape from a flash fire. Users of Tychem® ThermoPro, Tychem® Reflector® and Tychem® TK styles 600T/601T (with aluminized outer suit) garments should not knowingly enter an explosive environment. Tychem® garments with attached socks must be worn inside protective outer footwear and are not suitable as outer footwear. These attached socks do not have adequate durability or slip resistance to be worn as the outer foot covering.

(DuPont, 2023)

First Aid
INHALATION: remove victim from exposure; if breathing is difficult or stopped, give artificial respiration; call physician.

EYES or SKIN: flush with plenty of water immediately for at least 15 min. and get medical attention.

INGESTION: do NOT induce vomiting; give large amount of water; get medical attention. (USCG, 1999)

Physical Properties

The Physical Property fields include properties such as vapor pressure and boiling point, as well as explosive limits and toxic exposure thresholds The information in CAMEO Chemicals comes from a variety of data sources.

Note: For Vapor Density and Specific Gravity, comparing the value to 1.0 can tell you if the chemical will likely sink/rise in air or sink/float in fresh water (respectively). Short phrases have been added to those values below as an aid. However, make sure to also consider the circumstances of a release. The Vapor Density comparisons are only valid when the gas escaping is at the same temperature as the surrounding air itself. If the chemical is escaping from a container where it was pressurized or refrigerated, it may first escape and behave as a heavy gas and sink in the air (even if it has a Vapor Density value less than 1). Also, the Specific Gravity comparisons are for fresh water (density 1.0 g/mL). If your spill is in salt water (density about 1.027 g/mL), you need to adjust the point of comparison. There are some chemicals that will sink in fresh water and float in salt water.
Chemical Formula:
  • Cl3HSi
Flash Point: greater than -58°F (USCG, 1999)
Lower Explosive Limit (LEL): 1.2 % (USCG, 1999)
Upper Explosive Limit (UEL): 90.5 % (USCG, 1999)
Autoignition Temperature: 220°F (USCG, 1999)
Melting Point: -197°F (USCG, 1999)
Vapor Pressure: data unavailable
Vapor Density (Relative to Air): data unavailable
Specific Gravity: 1.344 at 68°F (USCG, 1999) - Denser than water; will sink
Boiling Point: 90°F at 760 mmHg (USCG, 1999)
Molecular Weight: 135.5 (USCG, 1999)
Water Solubility: data unavailable
Ionization Energy/Potential: data unavailable
IDLH: data unavailable

AEGLs (Acute Exposure Guideline Levels)

Final AEGLs for Trichlorosilane (10025-78-2)
Exposure Period AEGL-1 AEGL-2 AEGL-3
10 minutes 0.6 ppm 33 ppm 210 ppm
30 minutes 0.6 ppm 14 ppm 70 ppm
60 minutes 0.6 ppm 7.3 ppm 33 ppm
4 hours 0.6 ppm 3.7 ppm 8.7 ppm
8 hours 0.6 ppm 3.7 ppm 8.7 ppm
(NAC/NRC, 2023)

ERPGs (Emergency Response Planning Guidelines)

Chemical ERPG-1 ERPG-2 ERPG-3
Silane, Trichloro- (10025-78-2) 1 ppm star-in-circle icon indicates that odor should be detectable near ERPG-1. 3 ppm 25 ppm
star-in-circle icon indicates that odor should be detectable near ERPG-1.
(AIHA, 2022)

PACs (Protective Action Criteria)

Chemical PAC-1 PAC-2 PAC-3
Trichlorosilane (10025-78-2) 0.6 ppm 7.3 ppm 33 ppm LEL = 12000 ppm
(DOE, 2018)

Regulatory Information

The Regulatory Information fields include information from the U.S. Environmental Protection Agency's Title III Consolidated List of Lists, the U.S. Cybersecurity and Infrastructure Security Agency's Chemical Facility Anti-Terrorism Standards, and the U.S. Occupational Safety and Health Administration's Process Safety Management of Highly Hazardous Chemicals Standard List (see more about these data sources).

EPA Consolidated List of Lists

Regulatory Name CAS Number/
313 Category Code
EPCRA 302
EHS TPQ
EPCRA 304
EHS RQ
CERCLA RQ EPCRA 313
TRI
RCRA
Code
CAA 112(r)
RMP TQ
Silane, trichloro- 10025-78-2 10000 pounds
Trichlorosilane 10025-78-2 10000 pounds

(EPA List of Lists, 2022)

CISA Chemical Facility Anti-Terrorism Standards (CFATS)

RELEASE THEFT SABOTAGE
Chemical of Interest CAS Number Min Conc STQ Security
Issue
Min Conc STQ Security
Issue
Min Conc STQ Security
Issue
Trichlorosilane; [Silane, trichloro-] 10025-78-2 1.00 % 10000 pounds flammable ACG APA sabotage/ contamination

(CISA, 2007)

OSHA Process Safety Management (PSM) Standard List

Chemical Name CAS Number Threshold Quantity (TQ)
Trichlorosilane 10025-78-2 5000 pounds

(OSHA, 2019)

Alternate Chemical Names

This section provides a listing of alternate names for this chemical, including trade names and synonyms.